|hSʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|h
ʯӢԼ
ˮƷ
ʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%ϡ
ҹ˾1998ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢܡʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢܣֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀oͨB۹SiO2_99.6%γߴ硢W(wn)᷀(wn)׃ԺͿ܃(yu)W^_93%Óuu10ppm(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ܡӟhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_ڡp_A^ƽ^κ͔Usڡ߅ĥɰȼӹߜءgԺüc,VʹˮO䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)IʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚߜأԺҪJCJDH1-H7_߉cuȮa(chn)Ʒ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚
C\gĹ̻gӡˢͰbӹI(y)ѽ(jng)õVãͳʯӢ⾀ϵÇMg_l(f)®a(chn)ƷЧY·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)gҎ(gu)ָ˵Ҫ
҂Įa(chn)Ʒ|_˳Ҏ(gu)ҿԞ͑MЁDϼӹ
ҏSĮa(chn)Ʒ60Nև20Һ͵^(q)S\ź|пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|̓rĮa(chn)Ʒ҂Ŀ͑҂Ŀ͑ڸЈϾиĸ